Accurate Modelling and Simulation of Thermomechanical Microsystem Dynamics
S. Taschini, J. Muller, A. Greiner, M. Emmenegger, H. Baltes, J.G. Korvink

Source CMES: Computer Modeling in Engineering & Sciences, Vol. 1, No. 1, pp. 31-44, 2000
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Keywords microsystems, finite elements, plate theory, fluctuations, refinement
Abstract We present three techniques to accurately model the thermomechanical response of microsystem components: a new, accurate and stable Kirchhoff-Love multi-layered plate model implemented as an Argyris finite element, a model for the amplitude fluctuations of vibrational modes in micro-mechanical structures within a gaseous environment, and the consistent refinement of a finite element mesh in order to maximize the computational accuracy for a given mesh size. We have implemented these techniques in our in-house MEMS finite element program and accompanying Monte Carlo simulator. We demonstrate our approach to dynamic modeling by computing the thermomechanical response of a CMOS AFM beam.
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