@Article{cl.2026.089518,
AUTHOR = {Weihang Qiu, Bo Zhang, Zhaofeng Gu, Zijun Liu, Xiang Shen, Yimin Chen},
TITLE = {Structural Relaxation and Thermal Robustness of Electron-Beam Evaporated As<sub>2</sub>Se<sub>3</sub> Films for Far-Infrared Heterogeneous Metalenses},
JOURNAL = {Chalcogenide Letters},
VOLUME = {},
YEAR = {},
NUMBER = {},
PAGES = {{pages}},
URL = {http://www.techscience.com/CL/online/detail/28146},
ISSN = {1584-8663},
ABSTRACT = {This study presents electron-beam evaporated As<sub>2</sub>Se<sub>3</sub> films tailored for far-infrared heterogeneous metalenses. Characterization via X-ray diffraction and Raman spectroscopy reveals a structurally relaxed network in the films compared to bulk glass, resulting in enhanced infrared transmittance, a reduced refractive index, and a lower glass transition temperature. However, thermal expansion mismatch is found to induce cracking in thick films subjected to thermal cycling. The As<sub>2</sub>Se<sub>3</sub>/BaF<sub>2</sub> system demonstrates superior adhesion, attributed to a minimal thermal expansion mismatch (Δα &lt; 2.5 × 10<sup>−6</sup>°C<sup>−1</sup>). Notably, an 8 μm thick film endures over thirty rapid heating and liquid nitrogen quenching cycles without degradation, while maintaining a subwavelength thickness and optical properties suitable for metalens design. These findings establish the As<sub>2</sub>Se<sub>3</sub>/BaF<sub>2</sub> platform as a robust candidate for environmentally stable infrared heterogenous metasurfaces.},
DOI = {10.32604/cl.2026.089518}
}