%0 Journal Article %A Roychowdhury, A. %A Nandy, A. %A Jog, C.S. %A Pratap, R. %D 2014 %J Computer Modeling in Engineering \& Sciences %@ 1526-1506 %V 103 %N 2 %P 91--110 %T Hybrid Elements for Modelling Squeeze Film Effects Coupled with Structural Interactions in Vibratory MEMS Devices %M doi:10.3970/cmes.2014.103.091 %U http://www.techscience.com/CMES/v103n2/27112