TY - EJOU AU - He, X.S. AU - Liu, Q.X. AU - Huang, X.C. AU - Chen, Y.M. TI - Dynamic Response Analysis of the Fractional-Order System of MEMS Viscometer T2 - Computer Modeling in Engineering \& Sciences PY - 2015 VL - 108 IS - 3 SN - 1526-1506 AB - This paper presented dynamic response analysis for an MEMS viscometer. The responses are governed by a set of differential equations containing fractional derivatives. The memory-free Yuan-Agrawal’s approach was extended to solve fractional differential equations containing arbitrary fractional order derivative and then a simple yet efficient numerical scheme was constructed. Numerical examples show that the proposed method can provide very accurate results and computational efforts can be significantly saved. Moreover, the numerical scheme was extended to solve problems with a nonlinear spring. The influences of the nonlinear parameters on the dynamic responses were also efficiently analyzed. The dependence of the angular frequency on damping parameters was also revealed. The presented method can provide us a new perspective to measure the fluid viscosity. KW - MEMS viscometer KW - Memory-free scheme KW - Fractional derivative DO - 10.3970/cmes.2015.108.159