TY  - EJOU
AU  - Ishihara, Daisuke  
AU  - Horie, Tomoyoshi  
AU  - Niho, Tomoya  
AU  - Baba, Akiyoshi  

TI  - Hierarchal Decomposition for the Structure-Fluid-Electrostatic Interaction in a Microelectromechanical System
T2  - Computer Modeling in Engineering \& Sciences

PY  - 2015
VL  - 108
IS  - 6
SN  - 1526-1506

AB  - In this study, a hierarchal decomposition is proposed to solve the structure- fluid-electrostatic interaction in a microelectromechanical system (MEMS). In the proposed decomposition, the structure-fluid-electrostatic interaction is partitioned into the structure-fluid interaction and the electrostatic field using the iteratively staggered method, and the structure-fluid interaction is split into the structurefluid velocity field and the fluid pressure field using the projection method. The proposed decomposition is applied to a micro cantilever beam actuated by the electrostatic force in air. It follows from the comparisons among the numerical and experimental results that the proposed method can predict the MEMS vibration characteristics accurately.
KW  - structure-fluid-electrostatic interaction
KW  -  decomposition
KW  -  partitioning
KW  -  splitting
KW  -  finite element method
KW  -  microelectromechanical system
KW  -  staggered method
KW  -  projection method

DO  - 10.3970/cmes.2015.108.429