%0 Journal Article
%A Chen, Liangchao
%A Qiao, Yan
%A Zhang, Siwei
%A Liu, Bin
%A Shao, Yonghua
%A Zhan, Sijun

%D 2026
%J Computer Modeling in Engineering \& Sciences

%@ 1526-1506
%V 147
%N 1
%P 0--0

%T Modeling and Optimization of Diffusion Process Scheduling under Strict Queue Time Constraints in Semiconductor Manufacturing
%M doi:10.32604/cmes.2026.076245
%U http://www.techscience.com/CMES/v147n1/67118