@Article{cmes.2000.001.011,
AUTHOR = {Zhenjun  Zhu, Chang  Liu},
TITLE = {Simulation of Anisotropic Crystalline Etching using a Continuous Cellular Automata Algorithm},
JOURNAL = {Computer Modeling in Engineering \& Sciences},
VOLUME = {1},
YEAR = {2000},
NUMBER = {1},
PAGES = {11--20},
URL = {http://www.techscience.com/CMES/v1n1/24662},
ISSN = {1526-1506},
ABSTRACT = {We present results on the development of an anisotropic crystalline etching simulation (ACES) program based on a new continuous Cellular Automata (CA) model, which provides improved spatial resolution and accuracy compared with the conventional and the stochastic CA \mbox{methods}. Implementation of a dynamic CA technique provides increased simulation speed and reduced memory requirement (5x). A first ACES software based on common personal computer platforms has been realized. Simulated results of etching match well with experiments. We have developed a new methodology to obtain the etch-rate diagram of anisotropic etching efficiently using both experimental and numerical techniques.},
DOI = {10.3970/cmes.2000.001.011}
}