TY  - EJOU
AU  - Ljung, Per  
AU  - Bächtold, Martin 
AU  - Spasojevic, Mirko  

TI  - Analysis of Realistic Large MEMS Devices
T2  - Computer Modeling in Engineering \& Sciences

PY  - 2000
VL  - 1
IS  - 1
SN  - 1526-1506

AB  - This paper presents AutoMEMS®, a numerical simulation environment to efficiently analyze the behavior of large real-world MEMS designs. By automating surface-based model generation, meshing and field solver tools, it is possible to rapidly model large complex MEMS devices.
KW  - 

DO  - 10.3970/cmes.2000.001.021