@Article{cmes.2000.001.031,
AUTHOR = {S.  Taschini, J. Müller, A.  Greiner, M.  Emmenegger, H.  Baltes, J.G.  Korvink},
TITLE = {Accurate Modelling and Simulation of Thermomechanical Microsystem Dynamics},
JOURNAL = {Computer Modeling in Engineering \& Sciences},
VOLUME = {1},
YEAR = {2000},
NUMBER = {1},
PAGES = {31--44},
URL = {http://www.techscience.com/CMES/v1n1/24664},
ISSN = {1526-1506},
ABSTRACT = {We present three techniques to accurately model the thermomechanical response of microsystem components: a new, accurate and stable Kirchhoff-Love multi-layered plate model implemented as an Argyris finite element, a model for the amplitude fluctuations of vibrational modes in micro-mechanical structures within a gaseous environment, and the consistent refinement of a finite element mesh in order to maximize the computational accuracy for a given mesh size. We have implemented these techniques in our in-house MEMS finite element program and accompanying Monte Carlo simulator. We demonstrate our approach to dynamic modeling by computing the thermomechanical response of a CMOS AFM beam.},
DOI = {10.3970/cmes.2000.001.031}
}