Open Access

ARTICLE

Accurate Modelling and Simulation of Thermomechanical Microsystem Dynamics

S. Taschini¹, J. Müller², A. Greiner², M. Emmenegger¹, H. Baltes¹, J.G. Korvink²

1 Physical Electronics Laboratory, ETH Zürich, Switzerland
2 IMTEK, University of Freiburg, Germany