TY  - EJOU
AU  - Taschini, S.  
AU  - Müller, J. 
AU  - Greiner, A.  
AU  - Emmenegger, M.  
AU  - Baltes, H.  
AU  - Korvink, J.G.  

TI  - Accurate Modelling and Simulation of Thermomechanical Microsystem Dynamics
T2  - Computer Modeling in Engineering \& Sciences

PY  - 2000
VL  - 1
IS  - 1
SN  - 1526-1506

AB  - We present three techniques to accurately model the thermomechanical response of microsystem components: a new, accurate and stable Kirchhoff-Love multi-layered plate model implemented as an Argyris finite element, a model for the amplitude fluctuations of vibrational modes in micro-mechanical structures within a gaseous environment, and the consistent refinement of a finite element mesh in order to maximize the computational accuracy for a given mesh size. We have implemented these techniques in our in-house MEMS finite element program and accompanying Monte Carlo simulator. We demonstrate our approach to dynamic modeling by computing the thermomechanical response of a CMOS AFM beam.
KW  - microsystems
KW  -  finite elements
KW  -  plate theory
KW  -  fluctuations
KW  -  refinement

DO  - 10.3970/cmes.2000.001.031