Open Access

ARTICLE

A Methodology and Associated CAD Tools for Support of Concurrent Design of MEMS

B. F. Romanowicz¹, M. H. Zaman¹, S. F. Bart¹, V. L. Rabinovich¹, I. Tchertkov¹, S. Zhang¹, M. G. da Silva¹, M. Deshpande¹, K. Greiner¹, J. R. Gilbert¹, Shawn Cunningham²

1 Microcosm Technologies, Inc., 215 First St., Ste. 219, Cambridge, MA02142 U.S.A, Email: bfr@memcad.com.
2 Ford Microelectronics, Inc., Colorado Springs, CO, U.S.A.