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ARTICLE

A Methodology and Associated CAD Tools for Support of Concurrent Design of MEMS

B. F. Romanowicz1, M. H. Zaman1, S. F. Bart1, V. L. Rabinovich1, I. Tchertkov1, S. Zhang1, M. G. da Silva1, M. Deshpande1, K. Greiner1, J. R. Gilbert1, Shawn Cunningham2

Microcosm Technologies, Inc., 215 First St., Ste. 219, Cambridge, MA02142 U.S.A, Email: bfr@memcad.com.
Ford Microelectronics, Inc., Colorado Springs, CO, U.S.A.

TSP_CMES_45.pdf

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