TY  - EJOU
AU  - Romanowicz, B. F. 
AU  - Zaman, M. H. 
AU  - Bart, S. F. 
AU  - Rabinovich, V. L. 
AU  - Tchertkov, I. 
AU  - Zhang, S. 
AU  - Silva, M. G. da 
AU  - Deshpande, M. 
AU  - Greiner, K. 
AU  - Gilbert, J. R. 
AU  - Cunningham, Shawn 

TI  - A Methodology and Associated CAD Tools for Support of Concurrent Design of MEMS
T2  - Computer Modeling in Engineering \& Sciences

PY  - 2000
VL  - 1
IS  - 1
SN  - 1526-1506

AB  - Development of micro-electro-mechanical systems (MEMS) products is currently hampered by the need for design aids, which can assist in integration of all domains of the design. The cross-disciplinary character of microsystems requires a top-down approach to system design which, in turn, requires designers from many areas to work together in order to understand the effects of one sub-system on another. This paper describes current research on a methodology and tool-set which directly support such an integrated design process.
KW  - Micro-system
KW  -  MEMS
KW  -  CAD
KW  -  macro-model
KW  -  simulation

DO  - 10.3970/cmes.2000.001.045