%0 Journal Article
%A Garikipati, K.
%A Rao, V.S.
%A Hao, M.Y.
%A Ibok, E.
%A Wolf, I.-de
%A Dutton, R.-W.

%D 2000
%J Computer Modeling in Engineering \& Sciences

%@ 1526-1506
%V 1
%N 1
%P 65--84

%T Modelling and Validation of Contribions to Stress in the Shallow Trench Isolation Process Sequence
%M doi:10.3970/cmes.2000.001.065
%U http://www.techscience.com/CMES/v1n1/24666