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Design and Fabrication of an Electrostatic Variable Gap Comb Drive in Micro-Electro-Mechanical Systems

Wenjing Ye1, Subrata Mukherjee2

Georgia Institute of Technology, School of Mechanical Engineering, 281 Ferst Drive, SSTC #1, Room 209, Atlanta, GA 30332-0405
Department of Theoretical and Applied Mechanics, Kimball Hall, Cornell University, Ithaca, NY 14853

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