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The Temperature-Quantum-Correction Effect on the MD-Calculated Thermal Conductivity of Silicon Thin Films

Tai-Ming Chang1, Chien-Chou Weng1, Mei-Jiau Huang1,2, Chun-KaiLiu2, Chih-Kuang Yu2

Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan
Electronics & Optoelectronics Research Laboratories, Industrial Technology Research Institute,Taiwan

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