@Article{cmes.2004.005.279,
AUTHOR = {Wan-Sul  Lee, Kie-Chan  Kwon, Bong-Kyu  Kim, Ji-Hyon  Cho, Sung-Kie  Youn},
TITLE = {Frequency-Shifting Analysis of Electrostatically Tunable Micro-Mechanical Actuator},
JOURNAL = {Computer Modeling in Engineering \& Sciences},
VOLUME = {5},
YEAR = {2004},
NUMBER = {3},
PAGES = {279--286},
URL = {http://www.techscience.com/CMES/v5n3/29686},
ISSN = {1526-1506},
ABSTRACT = {A numerical approach for eigenvalue analysis of the electrostatically tunable micro-mechanical actuators is presented. An efficient algorithm for calculating the natural frequency shifting in the micro-mechanical actuators due to applied DC turning voltage is proposed. In the calculations of the coupled field problem, the three-dimensional FEM/BEM approaches and iterative staggered algorithm are employed. The numerical examples for actually fabricated actuators are presented and the numerical analysis results are compared with experimental data.},
DOI = {10.3970/cmes.2004.005.279}
}