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Frequency-Shifting Analysis of Electrostatically Tunable Micro-Mechanical Actuator

Wan-Sul Lee, Kie-Chan Kwon, Bong-Kyu Kim, Ji-Hyon Cho, Sung-Kie Youn1

Department of Mechanical Engineering, KAIST, 373-1, Guseongdong, Yuseong-gu, Daejon, 305-701, KOREA

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