TY  - EJOU
AU  - Lee, Wan-Sul  
AU  - Kwon, Kie-Chan  
AU  - Kim, Bong-Kyu  
AU  - Cho, Ji-Hyon  
AU  - Youn, Sung-Kie  

TI  - Frequency-Shifting Analysis of Electrostatically Tunable Micro-Mechanical Actuator
T2  - Computer Modeling in Engineering \& Sciences

PY  - 2004
VL  - 5
IS  - 3
SN  - 1526-1506

AB  - A numerical approach for eigenvalue analysis of the electrostatically tunable micro-mechanical actuators is presented. An efficient algorithm for calculating the natural frequency shifting in the micro-mechanical actuators due to applied DC turning voltage is proposed. In the calculations of the coupled field problem, the three-dimensional FEM/BEM approaches and iterative staggered algorithm are employed. The numerical examples for actually fabricated actuators are presented and the numerical analysis results are compared with experimental data.
KW  - micro-mechanical actuator
KW  -  electrostatic field
KW  -  natural frequency shifting
KW  -  coupled field analysis

DO  - 10.3970/cmes.2004.005.279