TY - EJOU AU - Jia, Fei AU - Zheng, Xiu-Peng AU - Cao, Yan-Ping AU - Feng, Xi-Qiao TI - Theoretical Study on the Bilayer Buckling Technique for Thin Film Metrology T2 - Computers, Materials \& Continua PY - 2010 VL - 18 IS - 2 SN - 1546-2226 AB - Recently, a novel technique based on the wrinkling of a bilayer composite film resting on a compliant substrate was proposed to measure the elastic moduli of thin films. In this paper, this technique is studied via theoretical analysis and finite element simulations. We find that under an applied compressive strain, the composite system may exhibit various buckling modes, depending upon the applied compressive strain, geometric and material parameters of the system. The physical mechanisms underlying the occurrence of the two most typical buckling modes are analyzed from the viewpoint of energy. When the intermediate layer is much thicker than the top layer, the condition under which the bilayer buckling will occur prior to other modes is given. The results reported here may facilitate the design of the bilayer buckling technique for the thin film metrology. KW - Wrinkling KW - bilayer KW - thin film metrology KW - finite element method DO - 10.3970/cmc.2010.018.105