TY - EJOU AU - Kurapati, S. N.V.R.K. AU - Lu, Y. C. AU - Yang, F. TI - Indentation Load-Displacement Relations for the Spherical Indentation of Elastic Film/Substrate Structures T2 - Computers, Materials \& Continua PY - 2010 VL - 20 IS - 1 SN - 1546-2226 AB - The spherical indentation of elastic film /substrate structures is analyzed using the finite element method. The load-displacement curves of the film /substrate structures of various configurations are obtained and analyzed. A generalized power law relation is established, which can be used to analyze the load-displacement curve of elastic film /substrate systems under spherical indentations. The indentation load is dependent on the modulus ratio of the film to the substrate and film thickness. A semi-analytical expression for the power of the power law relation is also obtained as a function of the normalized film thickness and normalized film modulus, which can be used to determine the modulus of the film from a spherical indentation test. KW - Nanoindentation KW - thin film KW - finite element method DO - 10.3970/cmc.2010.020.001