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Simulation Analysis and Experiment Study of Nanocutting with AFM Probe on the Surface of Sapphire Substrate by Using Three Dimensional Quasi-steady Molecular Statics Nanocutting Model

Zone-Ching Lin1, Ying-Chih Hsu1

Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taipei, Taiwan.

TSP_CMC_75.pdf

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