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Eigenvalue Analysis of MEMS Components with Multi-defect using Infinite Element Method Algorithm

De-Shin Liu1,2, Chin-Yi Tu1, Cho-Liang Chung3

Advanced Institute of Manufacturing for High-tech Innovations and Department of Mechanical Engineering, National Chung Cheng University, 168, University Rd., Min-Hsiung, Chia-Yi, 621, Taiwan, R.O.C.
Corresponding author. Tel.: +886-5-2720411 (Ext: 33305); fax: +886-5-2720589. E-mail address: imedsl@ccu.edu.tw (D.S. Liu).
Department of Materials Science and Engineering, I-Shou University, No. 1, section 1, Shiuecheng Road, Dashu Shiang, Kaohsiung Country, Taiwan, 840, R.O.C.

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