%0 Journal Article
%A Eslamian, Morteza
%A Saghir, M.-Ziad

%D 2012
%J Fluid Dynamics \& Materials Processing

%@ 1555-2578
%V 8
%N 4
%P 353--380

%T Thermodiffusion Applications in MEMS, NEMS and Solar Cell Fabrication by Thermal Metal Doping of Semiconductors
%M doi:10.3970/fdmp.2012.008.353
%U http://www.techscience.com/fdmp/v8n4/24308