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Thermodiffusion Applications in MEMS, NEMS and Solar Cell Fabrication by Thermal Metal Doping of Semiconductors

Morteza Eslamian1,2, M. Ziad Saghir1,3

Department of Mechanical and Industrial Engineering, Ryerson University, Toronto, Ontario, Canada M5B 2K3
Present Address: Texas A&M University- Corpus Christi; Email: Morteza.Eslamian@tamucc.edu (M. Eslamian)
Email: zsaghir@ryerson.ca (M. Z. Saghir)

TSP_FDMP_353.pdf

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