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ABSTRACT

An Investigation into Atomic Scale Forming Mechanism and Friction Characteristics in Direct Nanoimprint by Molecular Dynamics Simulation

Chih-Wei Hsieh1, Chien-Li Wu1, Cheng-Kuo Sung1,2

Dept. of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan,R.O.C.
E-mail: cksung@pme.nthu.edu.tw

TSP_ICCES_33.pdf

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