%0 Journal Article %A Liu, Zhanwei %A Xie, Huimin %A Dai, Fulong %D 2011 %J The International Conference on Computational \& Experimental Engineering and Sciences %@ 1933-2815 %V 18 %N 3 %P 95--96 %T Deformation analysis techniques applied to microstructures and micro-device %M doi:10.3970/icces.2011.018.095 %U http://www.techscience.com/icces/v18n3/33221