@Article{sl.2012.007.129,
AUTHOR = {A. Frangi, M. Cremonesi, A. Jaakkola, K. Bathe},
TITLE = {Optimization of MEMS Piezo-Resonators},
JOURNAL = {Structural Longevity},
VOLUME = {7},
YEAR = {2012},
NUMBER = {2},
PAGES = {129--134},
URL = {http://www.techscience.com/sl/v7n2/42867},
ISSN = {1944-6128},
ABSTRACT = {Single crystal silicon MEMS resonators are a potential alternative to
quartz for timing and frequency control applications. Even if capacitive resonators
with very high quality factors have been demonstrated and produced commercially,
in order to achieve a good electromechanical coupling and admissible impedance
levels, large bias voltages and submicron gaps are required. To overcome these
challenges, piezotransduced bulk MEMS resonators have rapidly emerged as a
valid alternative. We propose a numerical strategy to simulate dissipation mechanisms that correctly reproduce available experimental data.},
DOI = {10.3970/sl.2012.007.129}
}