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    ARTICLE

    Profile Analysis of Regularly Microstructured Surfaces

    H. Payer1, T. Haschke1, R. Reichardt1, G. Li2, K. Graf2,3, W. Wiechert1,3

    FDMP-Fluid Dynamics & Materials Processing, Vol.4, No.2, pp. 61-76, 2008, DOI:10.3970/fdmp.2008.004.061

    Abstract Microstructured surfaces are of steadily increasing importance in a large variety of technological applications. For the purpose of quality assurance, e.g. during variation studies of experimental parameters or for comparison with results from simulations, the surface geometry must be precisely measured and described in terms of geometric parameters. An analysis tool for regularly structured surfaces is presented that performs a highly automated evaluation of surface scanning data and derives geometric quality control parameters. To demonstrate the power of the analysis tool it is exemplarily applied for the investigation of microcraters emerging after the evaporation of micrometer-sized toluene droplets on a… More >

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