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Analysis of Realistic Large MEMS Devices

Per Ljung1, Martin Bächtold2, Mirko Spasojevic2

Coyote Systems, Inc., pbljung@coyotesystems.com
Coyote Systems, Inc.

Computer Modeling in Engineering & Sciences 2000, 1(1), 21-30. https://doi.org/10.3970/cmes.2000.001.021

Abstract

This paper presents AutoMEMS®, a numerical simulation environment to efficiently analyze the behavior of large real-world MEMS designs. By automating surface-based model generation, meshing and field solver tools, it is possible to rapidly model large complex MEMS devices.

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APA Style
Ljung, P., Bächtold, M., Spasojevic, M. (2000). Analysis of realistic large MEMS devices. Computer Modeling in Engineering & Sciences, 1(1), 21-30. https://doi.org/10.3970/cmes.2000.001.021
Vancouver Style
Ljung P, Bächtold M, Spasojevic M. Analysis of realistic large MEMS devices. Comput Model Eng Sci. 2000;1(1):21-30 https://doi.org/10.3970/cmes.2000.001.021
IEEE Style
P. Ljung, M. Bächtold, and M. Spasojevic "Analysis of Realistic Large MEMS Devices," Comput. Model. Eng. Sci., vol. 1, no. 1, pp. 21-30. 2000. https://doi.org/10.3970/cmes.2000.001.021



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