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Optimization of MEMS Piezo-Resonators

A. Frangi1, M. Cremonesi1, A. Jaakkola2, K. Bathe2

1 Politecnico di Milano, Italy.
2 VTT, Technical Research Centre of Finland,Espoo, Finland.

Structural Longevity 2012, 7(2), 129-134. https://doi.org/10.3970/sl.2012.007.129

Abstract

Single crystal silicon MEMS resonators are a potential alternative to quartz for timing and frequency control applications. Even if capacitive resonators with very high quality factors have been demonstrated and produced commercially, in order to achieve a good electromechanical coupling and admissible impedance levels, large bias voltages and submicron gaps are required. To overcome these challenges, piezotransduced bulk MEMS resonators have rapidly emerged as a valid alternative. We propose a numerical strategy to simulate dissipation mechanisms that correctly reproduce available experimental data.

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APA Style
Frangi, A., Cremonesi, M., Jaakkola, A., Bathe, K. (2012). Optimization of MEMS piezo-resonators. Structural Longevity, 7(2), 129-134. https://doi.org/10.3970/sl.2012.007.129
Vancouver Style
Frangi A, Cremonesi M, Jaakkola A, Bathe K. Optimization of MEMS piezo-resonators. Structural Longevity . 2012;7(2):129-134 https://doi.org/10.3970/sl.2012.007.129
IEEE Style
A. Frangi, M. Cremonesi, A. Jaakkola, and K. Bathe "Optimization of MEMS Piezo-Resonators," Structural Longevity , vol. 7, no. 2, pp. 129-134. 2012. https://doi.org/10.3970/sl.2012.007.129



cc Copyright © 2012 The Author(s). Published by Tech Science Press.
This work is licensed under a Creative Commons Attribution 4.0 International License , which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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