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A Methodology and Associated CAD Tools for Support of Concurrent Design of MEMS

B. F. Romanowicz1, M. H. Zaman1, S. F. Bart1, V. L. Rabinovich1, I. Tchertkov1, S. Zhang1, M. G. da Silva1, M. Deshpande1, K. Greiner1, J. R. Gilbert1, Shawn Cunningham2
Microcosm Technologies, Inc., 215 First St., Ste. 219, Cambridge, MA02142 U.S.A, Email: bfr@memcad.com.
Ford Microelectronics, Inc., Colorado Springs, CO, U.S.A.

Computer Modeling in Engineering & Sciences 2000, 1(1), 45-64. https://doi.org/10.3970/cmes.2000.001.045

Abstract

Development of micro-electro-mechanical systems (MEMS) products is currently hampered by the need for design aids, which can assist in integration of all domains of the design. The cross-disciplinary character of microsystems requires a top-down approach to system design which, in turn, requires designers from many areas to work together in order to understand the effects of one sub-system on another. This paper describes current research on a methodology and tool-set which directly support such an integrated design process.

Keywords

Micro-system, MEMS, CAD, macro-model, simulation

Cite This Article

Romanowicz, B. F., Zaman, M. H., Bart, S. F., Rabinovich, V. L., Tchertkov, I. et al. (2000). A Methodology and Associated CAD Tools for Support of Concurrent Design of MEMS. CMES-Computer Modeling in Engineering & Sciences, 1(1), 45–64.



This work is licensed under a Creative Commons Attribution 4.0 International License , which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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