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ARTICLE

Theoretical Study on the Bilayer Buckling Technique for Thin Film Metrology

Fei Jia1, Xiu-Peng Zheng1,2, Yan-Ping Cao1,3, Xi-Qiao Feng1

AML, Department of Engineering Mechanics, Tsinghua University, Beijing 100084, China
CNNC China Nuclear Power Engineering Co., Ltd. Beijing 100840, China
Corresponding author: Tel.: +86 10 62772520; e-mail: caoyanping@mail.tsinghua.edu.cn

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