Ming-Hsiao Lee, Wen-Hwa Chen
CMC-Computers, Materials & Continua, Vol.11, No.1, pp. 59-78, 2009, DOI:10.3970/cmc.2009.011.059
Abstract On the analysis of electrostatic-structural coupled problems as encountered in many electrostatic driven MEMS devices, the electrostatic analysis domain is often extremely distorted due to the deflection of the structure. This kind of problem is difficult to be dealt with by almost all kinds of available numerical methods. A new three-dimensional meshless scheme with background grid is thus proposed herein. By this scheme, a three-dimensional fixed background grid with regularly-distributed nodes is utilized. Another set of discretized boundary grid is employed to describe the boundary surfaces of both the structure and the electrostatic field. The analysis electrostatic/structural domains are modeled… More >
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