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    ARTICLE

    Determination of a Safe Distance for Atomic Hydrogen Depositions in Hot-Wire Chemical Vapour Deposition by Means of CFD Heat Transfer Simulations

    Lionel Fabian Fourie1, Lynndle Square2,*

    FDMP-Fluid Dynamics & Materials Processing, Vol.16, No.2, pp. 225-235, 2020, DOI:10.32604/fdmp.2020.08771

    Abstract A heat transfer study was conducted, in the framework of Computational Fluid Dynamics (CFD), on a Hot-Wire Chemical Vapour Deposition (HWCVD) reactor chamber to determine a safe deposition distance for atomic hydrogen produced by HWCVD. The objective of this study was to show the feasibility of using heat transfer simulations in determining a safe deposition distance for deposition of this kind. All CFD simulations were set-up and solved within the framework of the CFD packages of OpenFOAM namely; snappyHexMesh for mesh generation, buoyantSimpleFoam and rhoSimpleFoam as the solvers and paraView as the post-processing tool. Using a standard set of deposition… More >

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