Ming-Hsiao Lee1,2, Wen-Hwa Chen1, Yu-Ching Shih2
The International Conference on Computational & Experimental Engineering and Sciences, Vol.11, No.1, pp. 5-6, 2009, DOI:10.3970/icces.2009.011.005
Abstract In the electrostatic-structural problems as encountered in many electrostatic driven MEMS devices, the electrostatic analysis domain is often extremely distorted due to the deflection of the structure. This kind of problem is difficult to deal with by almost all kinds of available numerical methods. A new three-dimensional meshless scheme with background grid is thus proposed herein to solve those difficulties in numerical simulations.
By this scheme, a three-dimensional fixed background grid with regularly distributed nodes is utilized. Another set of discretized boundary grid is employed to describe both the surface boundaries of the structure and the electrostatic field. The analysis… More >
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