Cha’o-Kuang Chen1,2, Hsin-Yi Lai1, Chin-Chia Liu1
CMES-Computer Modeling in Engineering & Sciences, Vol.40, No.2, pp. 155-174, 2009, DOI:10.3970/cmes.2009.040.155
Abstract Electrostatically-actuated micro circular plates are used in many micro-electro-mechanical systems (MEMS) devices nowadays such as micro pumps and optical switches. However, the dynamic behavior of these circular plates is not easily analyzed using traditional analytic methods due to the complexity of the interactions between the electrostatic coupling effects. Accordingly, this study develops an efficient computational scheme in which the nonlinear governing equation of the coupled electrostatic force acting on the micro circular plate is solved using a hybrid differential transformation / finite difference approximation method. In deriving the dynamic equation of motion of the micro plate, explicit account is taken… More >
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