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    ARTICLE

    Effect of Residual Stresses on Wave Propagation in Adhesively Bonded Multilayered MEMS Structures

    M. Kashtalyan1,2, Y.A. Zhuk3

    CMES-Computer Modeling in Engineering & Sciences, Vol.57, No.1, pp. 1-30, 2010, DOI:10.3970/cmes.2010.057.001

    Abstract The paper investigates propagation of stationary plane longitudinal and transverse waves along the layers in adhesively bonded multilayered structures for MEMS applications in the presence of residual stresses. The multilayered structure is assumed to consist of the infinite amount of the periodically recurring layers made of two different materials possessing significantly dissimilar properties: conductive metal layer and insulating adhesive layer. It is assumed that the mechanical behaviour of both materials is nonlinear elastic and can be described with the help of the elastic Murnaghan potential depending on the three invariants of strain tensor. The problem is formulated in the framework… More >

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