Kamlendra Vikram1, Uvaraja Ragavendran2, Kanak Kalita1,*, Ranjan Kumar Ghadai3, Xiao-Zhi Gao4
CMC-Computers, Materials & Continua, Vol.66, No.2, pp. 1771-1784, 2021, DOI:10.32604/cmc.2020.013946
Abstract In this work, diamond-like carbon (DLC) thin film coatings are deposited on silicon substrates by using plasma-enhanced chemical vapour deposition (PECVD) technique. By varying the hydrogen (H2) flow rate, CH4−Argon (Ar) flow rate and deposition temperature (Td) as per a Box-Behnken experimental design (BBD), 15 DLC deposition experiments are carried out. The Young’s modulus (E) and the coefficient of friction (COF) for the DLCs are measured. By using a second-order polynomial regression approach, two metamodels are built for E and COF, that establish them as functions of H2 flow rate, CH4-Ar flow rate and Td. A non-dominated sorting genetic algorithm… More >
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