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Accurate Modelling and Simulation of Thermomechanical Microsystem Dynamics

S. Taschini1, J. Müller2, A. Greiner2, M. Emmenegger1, H. Baltes1, J.G. Korvink2

Physical Electronics Laboratory, ETH Zürich, Switzerland
IMTEK, University of Freiburg, Germany

Computer Modeling in Engineering & Sciences 2000, 1(1), 31-44.


We present three techniques to accurately model the thermomechanical response of microsystem components: a new, accurate and stable Kirchhoff-Love multi-layered plate model implemented as an Argyris finite element, a model for the amplitude fluctuations of vibrational modes in micro-mechanical structures within a gaseous environment, and the consistent refinement of a finite element mesh in order to maximize the computational accuracy for a given mesh size. We have implemented these techniques in our in-house MEMS finite element program and accompanying Monte Carlo simulator. We demonstrate our approach to dynamic modeling by computing the thermomechanical response of a CMOS AFM beam.


Cite This Article

Taschini, S., Müller, J., Greiner, A., Emmenegger, M., Baltes, H. et al. (2000). Accurate Modelling and Simulation of Thermomechanical Microsystem Dynamics. CMES-Computer Modeling in Engineering & Sciences, 1(1), 31–44.

cc This work is licensed under a Creative Commons Attribution 4.0 International License , which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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