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Frequency-Shifting Analysis of Electrostatically Tunable Micro-Mechanical Actuator

Wan-Sul Lee, Kie-Chan Kwon, Bong-Kyu Kim, Ji-Hyon Cho, Sung-Kie Youn1

Department of Mechanical Engineering, KAIST, 373-1, Guseongdong, Yuseong-gu, Daejon, 305-701, KOREA

Computer Modeling in Engineering & Sciences 2004, 5(3), 279-286. https://doi.org/10.3970/cmes.2004.005.279

Abstract

A numerical approach for eigenvalue analysis of the electrostatically tunable micro-mechanical actuators is presented. An efficient algorithm for calculating the natural frequency shifting in the micro-mechanical actuators due to applied DC turning voltage is proposed. In the calculations of the coupled field problem, the three-dimensional FEM/BEM approaches and iterative staggered algorithm are employed. The numerical examples for actually fabricated actuators are presented and the numerical analysis results are compared with experimental data.

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Lee, W., Kwon, K., Kim, B., Cho, J., Youn, S. (2004). Frequency-Shifting Analysis of Electrostatically Tunable Micro-Mechanical Actuator. CMES-Computer Modeling in Engineering & Sciences, 5(3), 279–286.



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