Table of Content

Open Access iconOpen Access


Frequency-Shifting Analysis of Electrostatically Tunable Micro-Mechanical Actuator

Wan-Sul Lee, Kie-Chan Kwon, Bong-Kyu Kim, Ji-Hyon Cho, Sung-Kie Youn1

Department of Mechanical Engineering, KAIST, 373-1, Guseongdong, Yuseong-gu, Daejon, 305-701, KOREA

Computer Modeling in Engineering & Sciences 2004, 5(3), 279-286.


A numerical approach for eigenvalue analysis of the electrostatically tunable micro-mechanical actuators is presented. An efficient algorithm for calculating the natural frequency shifting in the micro-mechanical actuators due to applied DC turning voltage is proposed. In the calculations of the coupled field problem, the three-dimensional FEM/BEM approaches and iterative staggered algorithm are employed. The numerical examples for actually fabricated actuators are presented and the numerical analysis results are compared with experimental data.


Cite This Article

Lee, W., Kwon, K., Kim, B., Cho, J., Youn, S. (2004). Frequency-Shifting Analysis of Electrostatically Tunable Micro-Mechanical Actuator. CMES-Computer Modeling in Engineering & Sciences, 5(3), 279–286.

cc This work is licensed under a Creative Commons Attribution 4.0 International License , which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
  • 936


  • 763


  • 0


Related articles

Share Link