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    Eigenvalue Analysis of MEMS Components with Multi-defect using Infinite Element Method Algorithm

    De-Shin Liu1,2, Chin-Yi Tu1, Cho-Liang Chung3

    CMC-Computers, Materials & Continua, Vol.28, No.2, pp. 97-120, 2012, DOI:10.3970/cmc.2012.028.097

    Abstract Manufacturing defects in the membrane of MEMS (Micro-Electro-Mechanical-Systems) structures have a significant effect on the sensitivity and working range of the device. Thus, in optimizing the design of MEMS devices, it is essential that the effects of membrane defects (e.g., cracks) can be predicted in advance. Accordingly, this study proposes the detailed two-dimensional Infinite Element Method (IEM) formulation with Infinite Element (IE)-Finite Element (FE) coupling scheme for analyzing the out-of-plane vibration of isotropic MEMS membranes containing one or more tip cracks. In the proposed approach, a degenerative computation scheme is used to condense the multiple element layers of the IEM… More >

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