Zhanwei Liu, Huimin Xie, Fulong Dai
The International Conference on Computational & Experimental Engineering and Sciences, Vol.18, No.3, pp. 95-96, 2011, DOI:10.3970/icces.2011.018.095
Abstract The mechanical behaviors of microstructures and micro devices have drawn the attention from researchers on materials and mechanics recently. To understand the rule of these behaviors, the deformation measurement techniques with micro/nanometer sensitivity and spatial resolution are required. In this report, a geometric phase analysis technique, SEM scanning moirAC method, digital phase moirAC method based on gratings and a micro-marker identification method are introduced to meet the deformation evaluation requirement of MEMS. The geometric phase analysis technique is performed on the basis of regular gratings, instead of natural atom lattice. The regular gratings with a… More >