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    A Methodology and Associated CAD Tools for Support of Concurrent Design of MEMS

    B. F. Romanowicz1, M. H. Zaman1, S. F. Bart1, V. L. Rabinovich1, I. Tchertkov1, S. Zhang1, M. G. da Silva1, M. Deshpande1, K. Greiner1, J. R. Gilbert1, Shawn Cunningham2

    CMES-Computer Modeling in Engineering & Sciences, Vol.1, No.1, pp. 45-64, 2000, DOI:10.3970/cmes.2000.001.045

    Abstract Development of micro-electro-mechanical systems (MEMS) products is currently hampered by the need for design aids, which can assist in integration of all domains of the design. The cross-disciplinary character of microsystems requires a top-down approach to system design which, in turn, requires designers from many areas to work together in order to understand the effects of one sub-system on another. This paper describes current research on a methodology and tool-set which directly support such an integrated design process. More >

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