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    ARTICLE

    Theoretical Study on the Bilayer Buckling Technique for Thin Film Metrology

    Fei Jia1, Xiu-Peng Zheng1,2, Yan-Ping Cao1,3, Xi-Qiao Feng1

    CMC-Computers, Materials & Continua, Vol.18, No.2, pp. 105-120, 2010, DOI:10.3970/cmc.2010.018.105

    Abstract Recently, a novel technique based on the wrinkling of a bilayer composite film resting on a compliant substrate was proposed to measure the elastic moduli of thin films. In this paper, this technique is studied via theoretical analysis and finite element simulations. We find that under an applied compressive strain, the composite system may exhibit various buckling modes, depending upon the applied compressive strain, geometric and material parameters of the system. The physical mechanisms underlying the occurrence of the two most typical buckling modes are analyzed from the viewpoint of energy. When the intermediate layer is much thicker than the… More >

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