Wan-Sul Lee, Kie-Chan Kwon, Bong-Kyu Kim, Ji-Hyon Cho, Sung-Kie Youn1
CMES-Computer Modeling in Engineering & Sciences, Vol.5, No.3, pp. 279-286, 2004, DOI:10.3970/cmes.2004.005.279
Abstract A numerical approach for eigenvalue analysis of the electrostatically tunable micro-mechanical actuators is presented. An efficient algorithm for calculating the natural frequency shifting in the micro-mechanical actuators due to applied DC turning voltage is proposed. In the calculations of the coupled field problem, the three-dimensional FEM/BEM approaches and iterative staggered algorithm are employed. The numerical examples for actually fabricated actuators are presented and the numerical analysis results are compared with experimental data. More >
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