S. Taschini1, J. Müller2, A. Greiner2, M. Emmenegger1, H. Baltes1, J.G. Korvink2
CMES-Computer Modeling in Engineering & Sciences, Vol.1, No.1, pp. 31-44, 2000, DOI:10.3970/cmes.2000.001.031
Abstract We present three techniques to accurately model the thermomechanical response of microsystem components: a new, accurate and stable Kirchhoff-Love multi-layered plate model implemented as an Argyris finite element, a model for the amplitude fluctuations of vibrational modes in micro-mechanical structures within a gaseous environment, and the consistent refinement of a finite element mesh in order to maximize the computational accuracy for a given mesh size. We have implemented these techniques in our in-house MEMS finite element program and accompanying Monte Carlo simulator. We demonstrate our approach to dynamic modeling by computing the thermomechanical response of a CMOS AFM beam. More >
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