
This study presents electron-beam evaporated As₂Se₃ thin films for far-infrared heterogeneous metalenses. Structural characterization reveals a relaxed film network compared with bulk glass, leading to enhanced infrared transmittance, a reduced refractive index, and a lower glass transition temperature. The study further demonstrates that the As₂Se₃/BaF₂ platform offers superior adhesion and thermal robustness, with an 8 μm-thick film surviving more than thirty rapid heating and liquid-nitrogen quenching cycles without degradation. These findings highlight As₂Se₃/BaF₂ as a promising platform for robust, environmentally stable far-infrared metalenses and heterogeneous metasurfaces.
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